ion-microprobe analysis

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A technique for analysing the surface composition of solids. The sample is bombarded with a narrow beam (as small as 2 μm diameter) of high-energy ions. Ions ejected from the surface by sputtering are detected by mass spectrometry. The technique allows quantitative analysis of both chemical and isotopic composition for concentrations as low as a few parts per million.

Subjects: Chemistry — Physics.

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